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Iyini isimiso sokusebenza kwemishini yokumboza nge-vacuum?
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A: Isebenzisa ubuchwepheshe be-Physical Vapor Deposition (PVD) noma i-Chemical Vapor Deposition (CVD) ukuze ifudumeze izinto eziqondiwe ekamelweni le-vacuum bese izibeka ngokulinganayo kuma-substrate, zenze izembozo ezisebenzayo ze-nanoscale.
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Yikuphi ukulungiswa okuvamile okudingekayo imishini?
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A: 1) Hlanza izinsalela zegumbi lokuhlanza njalo emahoreni angu-50 okusebenza; 2) Hlola amazinga kawoyela wepompo yomshini njalo ngenyanga kanye nokuqina kwesivalo; 3) Izinhlelo zokuqapha ukujiya kwefilimu njalo ngekota. Izinto ezisetshenziswayo zangempela ziyanconywa ukuze kusebenze kahle.
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Yiziphi izinto ezingambozwa yile mishini?
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A: Iyahambisana nezinsimbi (Al/Ti), izinto zobumba (Si3N4), ama-polymer, njll. Usayizi omkhulu we-substrate: Φ300mm×500mm. Isekela ukumbozwa ezintweni zokusebenza ezimise okwesiyingi.
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Kungakanani ukusetshenziswa kwamandla kwemishini?
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A: Amamodeli ajwayelekile anamandla alinganiswe angu-15kW anemodi yokonga amandla ehlakaniphile enciphisa ukusetshenziswa kokulinda ngo-40%. Izindleko zokusebenza komthwalo ogcwele cishe yi-¥9/ihora (ngokusekelwe ku-¥0.6/kWh yesilinganiso sezimboni).
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Indlela yokuxazulula izinkinga zenqubo?
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A: 1) Qhathanisa ama-curve enqubo yakamuva ye-batch eyi-10 nge-HMI; 2) Sebenzisa i-vacuum leak detector ukuqinisekisa ukuvalwa kwegumbi; 3) Xhumana nosekelo lobuchwepheshe ukuze uthole ukuxilongwa okukude (ukutholakala kwama-24/7).
I-HD500
