Indima Yemithombo Ye-Ion Ekumbozeni I-Vacuum: Kusukela Ekusebenzeni Komphezulu Kuya Ekuthuthukisweni Kwefilimu

Ukuqonda Ukusetshenziswa Okuyinhloko Kwemithombo Ye-Ion Ekumbozeni I-Vacuum

Ku- izinqubo zokumboza nge-vacuum njenge I-PVDfuthi I-PECVD, imithombo ye-ion ngezinye izikhathi ibhekwa njengezingxenye zokuzikhethela. Kodwa-ke, ekusetshenzisweni kokumboza okusebenzayo kakhulu, imvamisa iyisici esibalulekile ekunqumeni ikhwalithi yokumboza.

Ezimbonini ezifana amathuluzi okusika, izingxenye ezinembile, kanye nezingxenye ze-elekthronikhi, ubuchwepheshe bomthombo we-ion—ngokusebenzisa Ukufakwa Kwe-Ion Assisted (IAD)—kungathuthukisa kakhulu ukunamathela kwe-coating, ubuningi, kanye nokuzinza. Ngakho-ke sekuwubuchwepheshe obubalulekile bokuthuthukisa ukusebenza kwe-coating.

Ezixazululweni zemishini yokumboza ezakhiwe yi- I-Huasheng Nanotechnology, ubuchwepheshe bomthombo we-ion buvame ukuhlanganiswa Izinhlelo ze-PVD, DLC, kanye ne-PECVD, enikeza ukulawula okuzinzile kwemisebe ye-ion kanye nokudala isisekelo sokumboza esithembeke kakhudlwana sezinto ezahlukene kanye nezingxenye eziyinkimbinkimbi.

1. Isimiso Esiyisisekelo Sokusebenza Somthombo We-Ion

Umsebenzi oyinhloko womthombo we-ion uku khiqiza futhi usheshise imisebe ye-ion enamandla aphezulu.

Ngaphakathi kwegumbi le-ionization, amagesi angasebenzi (ngokuvamile i-argon) noma amagesi asabelayo ahlanganiswa ukuze akhe izinhlayiya ezishajiwe. Lawa ma-ion abe esesheshiswa yinsimu kagesi bese eqondiswa endaweni okuhlosiwe kuyo noma endaweni yokusebenza, ehlanganyela enqubweni yokumboza.

Inqubo ingenziwa lula kanje:

Igesi → I-Ionization → I-Ion Beam → Ukusheshisa → Ukuqhuma Okungaphezulu

I amandla, isiqondiso, kanye nobuningikonke ukuqina kwe-ion kungalawulwa, okuvumela ukulawulwa okunembile kwenqubo yokumboza.

Emishinini yesimanje yokumboza nge-vacuum, imithombo ye-ion ayisetshenziswa kuphela ngesikhathi sokufakwa kodwa futhi idlala indima ku ngaphambi kokwelashwa, ukufakwa kwengubo, kanye nezigaba zangemva kokwelashwa.

2. Izicelo Ezintathu Eziyinhloko Zemithombo Ye-Ion Ekumbozeni I-Vacuum

• Ngaphambi Kokumboza: Ukuhlanza Nokusebenzisa Indawo

Ikhwalithi yokumboza incike kakhulu esimweni sobuso be-substrate.

Uma ubuso buqukethe izendlalelo ze-oxidation, ukungcoliswa kwamafutha, noma izinhlayiya ezincane, ukunamathela kwe-coating kungancishiswa kakhulu.

Imithombo ye-ion ivame ukusetshenziswa ukuhlanza ama-ionngaphambi kokufakwa.

Ama-ion anamandla aphezulu ahlasela indawo yokusebenza ukuze:

Susa izingqimba ze-oxide kanye nokungcola

Susa izinhlayiya ezincane kakhulu

Yenza kusebenze amandla angaphezulu ezinto ezibonakalayo

Ngesikhathi esifanayo, ukuqhuma kwama-ion kudala i- indawo encane egobile, okunikeza izindawo ezengeziwe zokubopha ifilimu efakiwe.

Lesi "sakhiwo esincane sokubambelela" sithuthukisa kakhulu ukunamathela kwesembozo futhi sisiza ekuvimbeleni ukuqhekeka kwesembozo noma ukususwa kwesembozo.

Lesi sinyathelo sibaluleke kakhulu ku- izinhlelo zokusebenza zokusika amathuluzi okusika.

• Ngesikhathi Sokumboza: Ukufakwa Kwe-Ion-Assisted (Umsebenzi Oyinhloko)

Indima ebaluleke kakhulu yemithombo ye-ion yenzeka ngesikhathi sokufakwa.

Ngesikhathi ama-athomu okuhlanganisa efakwa ku-substrate, imisebe ye-ion ihlasela ifilimu ekhulayo ngasikhathi sinye, idale inqubo yokufaka i-ion esizwa yi-ion.

Le nqubo iletha izinzuzo eziningana.

Ukuthuthukisa Ubuningi Befilimu

Ukuqhuma kwe-ion kukhuthaza ukuhlelwa kabusha kwe-athomu ngaphakathi kwengubo ekhulayo, okwenza isakhiwo sefilimu sibe sincane kakhulu.

Imiphumela ihlanganisa:

Izimbobo ezincane ezincishisiwe

Ukwehla kwe-porosity

Ukumelana nokugqwala okuthuthukisiwe

Ukumelana nokuguguleka okuthuthukisiwe

Ukuthuthukisa Ukufana Kokumboza

Kumajiyometri ayinkimbinkimbi, izindlela zokubeka zendabuko zingakhiqiza umphumela wesithunzi, okushiya izindawo ezithile zingamboziwe kahle.

Imisebe ye-ion ingaqondiswa ukuze ilungise lezi zindawo, ithuthukise ukufana kwesembozo.

Lokhu kubaluleke kakhulu ku:

Ukusika imiphetho yamathuluzi

Izingxenye eziqondile

Izakhiwo ezinobukhulu obuthathu

Ukulawula Isakhiwo Esincane Sefilimu

Ngokulungisa amandla okukhanya kwe-ion, isakhiwo sekristalu kanye nendlela yokukhula kwengubo kungashintshwa.

Ngokwesibonelo:

Ukuthuthukisa ukumelana nokuguguleka kwezingubo eziqinile

Ukuthuthukisa ukubukeka nokukhanya kwezingubo zokuhlobisa

Ukuthuthukisa ukucaca kanye nokuqina kwezembozo ezijiyile

Leli khono libalulekile ezinhlelweni zokusebenza ezidinga ubulukhuni obuphezulu kanye nokugqoka okuzinzile.

• Ngemva Kokumboza: Ukuguqulwa Kwefilimu

Kwezinye izinqubo zokumboza ezithuthukisiwe, imithombo ye-ion nayo isetshenziselwa ukwelashwa ngemuva kokugqoka.

Ukuqhuma kwe-ion kwefilimu efakiwe kungenza:

Nciphisa ukucindezeleka kwangaphakathi ngaphakathi kwengubo

Thuthukisa amandla okubopha phakathi kokumboza kanye ne-substrate

Thuthukisa ukushelela kobuso

Yehlisa i-coefficient yokungqubuzana

Lokhu kwelashwa kuvame ukusetshenziswa ku- Izembozo ze-DLC (ezifana ne-carbon)kanye namanye amafilimu asebenzayo.

3. Ukusetshenziswa Kwemithombo Ye-Ion Ezinqubweni Ezihlukene Zokumboza

Imithombo ye-ion ingahlanganiswa nobuchwepheshe obuhlukahlukene bokumboza, ngemisebenzi ehlukene kuye ngenqubo.

• I-PVD Magnetron Sputtering

Ekuqhumeni kwe-magnetron, imithombo ye-ion isiza kakhulu ku:

Thuthukisa ukunamathela kokumboza

Khulisa ubuningi bengubo

Nciphisa ukuhlukahluka kombala kumafilimu okuhlobisa

Izinhlelo zokusebenza ezijwayelekile zifaka:

Ukusika izembozo zamathuluzi

Izindlu zocingo oluphathwayo

Izembozo zokuhlobisa

• Isimbozo Sokuhwamuka Komshini

Ukwembozwa kokuhwamuka kunikeza amazinga aphezulu okufakwa kodwa kuvame ukukhiqiza amafilimu anezimbobo ezincane.

Imithombo ye-ion isiza ukunqoba lezi mikhawulo ngokuthi:

Ukwanda kobuningi bengubo

Ukuthuthukisa ukuzinza kwefilimu

Ukuthuthukisa ukusebenza kwe-optical

Izinhlelo zokusebenza ezijwayelekile zifaka:

Amalensi okukhanya

Izihlungi

Izimbozo ezikhanyayo

• Izinqubo ze-PECVD

Ezinqubweni ze-PECVD, imithombo ye-ion ingasiza ekwenzeni amagesi asabelayo abe yi-ion ngendlela ephumelela kakhulu.

Izindima zabo eziyinhloko zifaka:

Ukwanda kwezinga lokufakwa kwemali

Ukuthuthukisa ukufana kokumboza

Ukuthuthukisa ukuzinza kwefilimu kanye nokungaguquguquki

Izinhlelo zokusebenza ezijwayelekile zifaka:

Amafilimu okuvikela uthuli

Izimbozo ezisebenzayo

Amafilimu amancane ahlobene ne-semiconductor

4. Izici Eziyinhloko Ekukhetheni Umthombo We-Ion

Izinhlelo zokusebenza ezahlukene zokumboza zidinga ukucushwa okuhlukile komthombo we-ion.

Imingcele ebalulekile okufanele icatshangelwe ifaka:

• Uhla Lwamandla E-Ion Beam

Inquma ikhono lokuqhuma kanye nekhono lokulawula isakhiwo sokumboza.

• Ukuzinza kwe-Ion Beam

Imishayo ye-ion ezinzile iqinisekisa izinqubo zokumboza ezihambisanayo kanye nesivuno esikhulu sokukhiqiza.

• Umthombo we-Ion Isikhathi Sokuphila

Ukuphila isikhathi eside kwenkonzo kunciphisa izindleko zokulungisa futhi kuthuthukisa ukusetshenziswa kwemishini.

• Ububanzi be-Ion Beam

Imithombo ye-ion enemisebe ebanzi ifaneleka kakhulu ezindaweni zokusebenza ezinkulu noma ekukhiqizweni kweqoqo.

Empeleni, ukukhetha kufanele kucabangele izinto zokumboza, uhlobo lokumboza, kanye nezidingo zohlelo lokusebenza.

5. I-Huasheng Nanotechnology kanye ne-Ion-Assisted Coating Technology

Ezisetshenzisweni zokugqoka zezimboni, ubuchwepheshe bomthombo we-ion bube yingxenye ebalulekile yezinhlelo zokugqoka ezisebenza kahle kakhulu.

Ekuthuthukisweni kwe I-PVD, i-DLC, kanye Imishini yokumboza ye-PECVD, I-Huasheng Nanotechnologyisebenzisa ubuchwepheshe obusizwa yi-ion ukuze ithuthukise izinqubo zokumboza, njenge:

Ukuthuthukisa ukunamathela kanye nokumelana nokuguguleka kwezembozo zamathuluzi okusika

Ukuthuthukisa ukufana kokumboza ezingxenyeni eziyinkimbinkimbi

Ukuqina okwandayo kanye nokuvumelana kwezimbozo ezisebenzayo

Ngokuhlanganisa ukuklama imishini kanye nokwenza ngcono izinqubo, ubuchwepheshe bomthombo we-ion bungaletha ukusebenza okuzinzile kuzo zonke izinhlelo zokusebenza zokumboza ezahlukahlukene.

Isiphetho

Inani eliyinhloko lemithombo ye-ion lisekhonweni layo lokwenza thuthukisa izinqubo zokumboza zendabuko ngokufakwa kwe-ion okusizwa yi-ion.

Kusukela ekuhlanzeni ubuso ngaphambi kokumboza, kuya ekuqiniseni ukukhula kwefilimu ngesikhathi sokufakwa, ngisho nokushintsha izakhiwo zefilimu ngemva kokumboza, imithombo ye-ion idlala indima kuyo yonke inqubo yokumboza.

Njengoba izimboni zokukhiqiza zifuna ukusebenza okuphezulu kokumboza, imithombo ye-ion iba ubuchwepheshe obubaluleke kakhulu emishinini yesimanje yokumboza nge-vacuum.